Lub tshuab nqus tsev twj siv rau cov txheej txheem semiconductor kev nyab xeeb teeb meem dej nplhaib lub tshuab nqus tsev twjvalveflange kev twb kev txuas
Nyob rau hauv lub xyoo dhau los, nrog rau kev loj hlob sai ntawm semiconductor technology, semiconductor khoom kuj nyob rau hauv tiam tom qab tiam innovation thiab kev loj hlob. Niaj hnub no, kev tsim thiab siv cov khoom siv semiconductor suav nrog ntau yam tshuaj lom neeg thiab ntau yam ntawm cov cuab yeej siv siab, nrog rau kev siv zog ua tiav. Tsis tas li ntawd xwb, kev txhim kho cov cuab yeej siv hluav taws xob semiconductor maj mam sib txuas cov txheej txheem thev naus laus zis modularization rau hauv cov khoom siv, ua rau nws ua haujlwm siab thiab txawj ntse, maj mam hloov qhov xwm txheej ntawm kev sib cais ntawm cov khoom siv thiab cov txheej txheem, thiab ib txwm taug kev nyob rau hauv pem hauv ntej ntawm txoj kev loj hlob. ntawm semiconductor system manufacturing kev lag luam, ua lub luag haujlwm tseem ceeb tshwj xeeb. Nrog rau kev txhim kho ntxiv ntawm cov khoom siv semiconductor, nws daim ntawv thov teb ua ntau dua thiab dav. Hauv lwm qhov chaw tsim khoom siv hluav taws xob, cov khoom siv hluav taws xob semiconductor lossis cov cuab yeej hloov kho los ntawm cov khoom siv hluav taws xob semiconductor kuj tau txais kev hloov pauv mus rau qib sib txawv, dhau los ua daim teb tshiab ntawm cov khoom siv semiconductor. Tshwj xeeb tshaj yog nyob rau hauv cov khoom siv hluav taws xob micro / nano, micro / nano optoelectromechanical systems thiab lwm yam khoom tsim kev lag luam ntawm qhov me me thiab siab precision, nws muaj qhov tseem ceeb heev rau kev tsim cov khoom siv hluav taws xob.
Semiconductor txheej txheem nqus tsev yog tsuas yog siv nyob rau hauv evaporation, sputtering, PECVD, nqus qhuav etching, nqus adsorption, xeem cov cuab yeej, nqus tsev vacuum thiab lwm yam kev sib txuas cov txheej txheem, semiconductor ntau lawm thiab manufacturing txheej txheem yooj yim tsim flammable, explosive thiab lom cov khoom siv roj, yuav ua rau muaj kev hem thawj rau kev tsim khoom thiab kev nyab xeeb ntawm cov neeg ua haujlwm, yog li ntawd, daim ntawv thov ntawm semiconductor nqus tsev vacuum yuav tsum tau them sai sai rau ntau yam kev nyab xeeb:
1. Lim thiab ntxuav lub tshuab nqus tsev twj thiab lwm yam khoom siv, lim thiab yeeb nkab raws sij hawm kom tsis txhob muaj kev kub ntxhov ntau dhau:
Nyob rau hauv daim ntawv thov ntawm semiconductor nqus tsev twj, muaj pes tsawg leeg ntawm nruab nrab muab rho tawm los ntawm cov tshuaj tiv thaiv chamber thiab lub tshuab nqus tsev twj tso kua mis yuav tsis tshua muaj complex. Piv txwv li, SiH4 thiab O2 daim ntawv SiO2 ntawm lub twj tso kua mis chaw nres nkoj, thiab cov hydrolysis ntawm TiCl4 yuav tsim HCl; Piv txwv tias cov roj foob hom tshuab twj tso kua mis, cov khoom siv roj no kuj tuaj yeem thim rov qab nrog cov roj twj tso kua mis. Cov kev hloov pauv no xav tias tsim cov khoom, cov khoom coagulable, lossis cov xov xwm erosive, uas tuaj yeem txhaws lub tshuab nqus tsev twj lossis cov kav dej, cuam tshuam rau lub tshuab nqus tsev twj ua haujlwm, ua rau lub siab nce lossis overpressure, thiab qhov kev pheej hmoo hais txog qhov thib ob yog ntau dua. Yog li ntawd, nws yog ib qho tsim nyog yuav tsum tau ntxuav hauv lub sijhawm, thiab teeb tsa cov khoom siv lim dej thaum tsim nyog.
2, zoo dilution ntawm teeb meem roj concentration:
Semiconductor yog ib qho yooj yim los tsim cov lus hais saum toj no, ua rau tawg thiab tawg, tshuaj lom thiab teeb meem gases. Yog li ntawd, nyob rau hauv daim ntawv thov ntawm semiconductor lub tshuab nqus tsev twj tso kua mis, thaum tshem tawm cov xov xwm, nws yog ib qhov tsim nyog los tiv thaiv lawv los ntawm ib co uncontrollable tshwm sim nyob rau hauv lub tshuab nqus tsev twj tso kua mis los yog nyob rau hauv lub tso pa tawm. Xws li SiH4, PH3, AsH3, B2H6 thiab lwm yam khoom, nyob rau hauv kev sib cuag nrog huab cua los yog oxygen, yuav ua rau combustion los yog txawm; Hydrogen gas kuj kub hnyiab tau thaum qhov sib tov sib xyaw hauv huab cua nce mus txog qhov kub thiab txias. Nws tag nrho yog nyob ntawm tus nqi ntawm cov khoom thiab nws cov kev sib raug zoo rau lub siab thiab kub ntawm ib puag ncig. Yog li ntawd, thaum lub tshuab nqus tsev semiconductor tshem tawm cov xov xwm no, nws yuav tsum tau siv cov roj inert, xws li nitrogen, kom dilute cov roj no mus rau qhov chaw nyab xeeb ua ntej compression.
3. Ua tib zoo saib xyuas cov concentration ntawm oxygen:
Yog tias cov pa oxygen hauv huab cua siab dhau lawm, kev sib tsoo thiab kev pheej hmoo yuav tshwm sim. Yog li ntawd, nyob rau hauv tej rooj plaub, yuav tsum tau them nyiaj mloog mus rau lub concentration ntawm cov pa, siv inert gas rau dilute, kom tsis txhob muaj siab concentration; Piv txwv tias cov roj foob lub tshuab twj tso kua mis kuj yuav tsum tau siv qee qhov inert thiab oxygen tshaj lub tshuab nqus tsev twj, thiab hloov lub sij hawm hloov cov roj lim thiab cov khoom siv roj.
4, tiv thaiv qhov kub thiab txias:
Nws yog ib qho yooj yim to taub lub ntsiab lus no. Nyob rau hauv daim ntawv thov ntawm semiconductor nyob rau hauv lub tshuab nqus tsev twj, muaj ntau yam teeb meem gases. Txawm hais tias lub tshuab nqus tsev twj tso kua mis qhuav tseem yog roj foob cov tshuab twj tso kua mis, qhov kub ntawm lub twj tso kua mis chamber yog siab dhau lawm, thiab nplaim taws thiab tawg thiab du gas yuav yooj yim txaus ntshai thaum kub siab.
4 yam saum toj no yog qhov tseem ceeb ntawm kev nyab xeeb hauv kev siv lub tshuab nqus tsev semiconductor. Feem ntau, roj foob cov tshuab twj yuav tsum tau them sai sai rau cov ntsiab lus kev nyab xeeb ntau dua li lub tshuab nqus tsev qhuav, kev pov tseg yog qhov nyuaj dua. Thaum peb siv lub tshuab nqus tsev twj, peb yuav tsum tau xyuam xim rau kev ceev faj txog kev nyab xeeb ntawm tus neeg xyuas pib, thiab ua haujlwm zoo hauv phau ntawv ua haujlwm thaum siv tom qab. Vim tias muaj teeb meem me me ntawm kev ua haujlwm, cov khoom tsim tawm, kev ua haujlwm zoo thiab kev nyab xeeb yog txuas, peb yuav tsum txuas ntxiv lub neej kev pab cuam ntawm lub tshuab nqus tsev twj tso kua mis, sib zog ua kom sib npaug, ua kom muaj txiaj ntsig thiab kev nyab xeeb.
Dej nplhaib lub tshuab nqus tsev twj tso kua mis valve flange kev twb kev txuas daim ntawv
Raws li cov duab ntawm qhov sib koom ua ke, nws tuaj yeem muab faib ua cov hauv qab no:
1, O-ring hom: qhov no yog ib hom tshiab ntawm lub tshuab nqus tsev twj tso kua mis flange kev twb kev txuas daim ntawv, yog ua raws li los ntawm ntau yam ntawm cov roj hmab O-ring txoj kev loj hlob, nws yog ntau txhim khu kev qha nyob rau hauv sealing nyhuv tshaj lub dav lub tshuab ntxhua khaub ncaws.
2, trapezoidal groove hom: dej nplhaib lub tshuab nqus tsev twj tso kua mis valve flange kev twb kev txuas nrog oval hlau nplhaib raws li lub tshuab ntxhua khaub ncaws, siv rau kev ua haujlwm siab 64 kg / cm2 valve lossis siab kub valve
3. Mortise thiab groove hom: Lub gasket nrog loj yas deformation tuaj yeem siv rau hauv nruab nrab corrosive. Lub sealing nyhuv ntawm lub nplhaib dej lub tshuab nqus tsev twj yog zoo dua
4. Concave thiab convex hom: kev ua haujlwm siab ntawm lub nplhaib lub tshuab nqus tsev twj tso kua mis siab dua, thiab lub tshuab ntxhua khaub ncaws tuaj yeem siv tau.
5, hom lens: lub tshuab ntxhua khaub ncaws yog cov duab ntawm lub lens, ua los ntawm hlau. Siab siab li qub los yog kub siab li qub nrog kev ua haujlwm siab ntawm 100kg / cm2
6, hom du: rau lub siab tsis siab valve, ua kom yooj yim dua
Lub tshuab nqus tsev twj tso kua mis flange kev twb kev txuas yog muaj ntau hom, tab sis lawv muaj ntau zaus, nyob rau hauv kev siv, peb yuav tsum xyuam xim rau qhov haum ntawm lub ntees, xyuas kom meej cov nyhuv ntawm kev twb kev txuas, tsis txhob ua rau kev twb kev txuas tsis ua hauj lwm, ua rau cov dej puas. lub tshuab nqus tsev twj tso kua mis
Post lub sij hawm: Jan-07-2023
