Mgbochi mgbapụta etinyere na semiconductor usoro nchekwa okwu mmiri mgbanaka agụụ agụụ mgbapụta valvụ flange njikọ

Vacuum mgbapụta etinyere na semiconductor usoro nchekwa okwu mmiri mgbanaka agụụ mgbapụtavalvụnjikọ flange

N'ime iri afọ gara aga, site na mmepe ngwa ngwa nke teknụzụ semiconductor, akụrụngwa semiconductor dịkwa n'ọgbọ ruo ọgbọ ọhụrụ na mmepe. N'oge a, imepụta na iji akụrụngwa semiconductor gụnyere ụdị kemịkalụ dị iche iche na ọtụtụ akụkụ ndị ọzọ nke teknụzụ dị elu, yana teknụzụ siri ike zuru oke. Ọ bụghị naanị dị ka ndị dị otú ahụ, mmepe nke semiconductor akụrụngwa technology nke nta nke nta integrates usoro technology modularization n'ime ngwá, na-eme ka ọ ukwuu akpaghị aka na ukwuu nwere ọgụgụ isi, nke nta nke nta na-agbanwe ọnọdụ nke eke nkewa nke ngwá na usoro, na mgbe niile na-eje ije na ụzọ nke mmepe. nke ụlọ ọrụ mmepụta ihe nke semiconductor, na-arụ ọrụ dị mkpa pụrụ iche. Site na mmepe nke akụrụngwa semiconductor, mpaghara ngwa ya na-abawanye ụba. N'ebe nrụpụta ngwaọrụ eletrọnịkị ndị ọzọ, akụrụngwa ma ọ bụ akụrụngwa sitere na akụrụngwa semiconductor na-anakwere ruo ogo dị iche iche, na-aghọ mpaghara ọhụrụ nke ngwa ngwa semiconductor. Karịsịa na ngwaọrụ eletrọnịkị micro/nano, micro/nano optoelectromechanical sistemu na ngwaahịa ndị ọzọ na-emepụta ubi nke pere mpe na nkenke dị elu, ọ nwere ihe dị oke mkpa maka mmepe nke akụrụngwa elektrọnik.

A na-ejikarị usoro oghere Semiconductor mee ihe na evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, test equipment, vacuum cleansing and other bonding processes, semiconductor mmepụta na n'ichepụta usoro mfe na-ere ọkụ, ihe mgbawa na-egbu egbu gas ihe onwunwe, ga-abụ ihe iyi egwu na. mmepụta na nchekwa ndị ọrụ, ya mere, ngwa nke semiconductor vacuum pump kwesịrị ịṅa ntị n'ọtụtụ ihe nchekwa:

1. Nzacha ma kpochaa mgbapụta agụụ na ngwa ndị ọzọ, nzacha na ọkpọkọ na nhazi oge iji zere oke nrụgide:

N'ime ngwa nke semiconductor vacuum pump, ihe mejupụtara nke ọkara nke ewepụtara site na ọnụ ụlọ mmeghachi omume na mgbapụta mgbapụta nwere ike ịdị mgbagwoju anya. Dịka ọmụmaatụ, SiH4 na O2 na-etolite SiO2 na ọdụ ụgbọ mmiri, na hydrolysis nke TiCl4 ga-etolite HCl; Na-eche na mmanụ akara ụdị igwe mgbapụta, ihe gas ndị a nwekwara ike gbanwee na mgbapụta mmanụ. Mgbanwe ndị a na-eche na e guzobere ụmụ irighiri ihe, ihe ndị na-agbakọ agbagọ, ma ọ bụ mgbasa ozi erosive, nke nwere ike mechie mgbapụta mgbapụta ma ọ bụ usoro ọkpọkọ, na-emetụta ọrụ mgbapụta agụụ, na-eme ka nrụgide na-ebili ma ọ bụ nrịbama, na ihe ize ndụ a kpọtụrụ aha na isi ihe nke abụọ ka ukwuu. Ya mere, ọ dị mkpa ka ihicha n'oge, ma dozie ihe nzacha mgbe ọ dị mkpa.

2, dilution dị irè nke itinye uche gas na-emerụ ahụ:

Semiconductor na-adịkarị mfe imepụta ihe a kpọtụrụ aha n'elu nke na-ere ọkụ na ihe mgbawa, gas na-egbu egbu na nke na-emerụ ahụ. Ya mere, na ntinye nke semiconductor vacuum pump, mgbe ị na-ewepụ mgbasa ozi ndị a, ọ dị mkpa iji gbochie ha inwe mmeghachi omume na-enweghị ike ịchịkwa na mgbapụta mgbapụta ma ọ bụ na usoro nkwụsị. Dị ka SiH4, PH3, AsH3, B2H6 na ihe ndị ọzọ, na kọntaktị na ikuku ma ọ bụ oxygen, ga-eme ka combustion ma ọ bụ ọbụna; Mmiri hydrogen na-erekwa ọkụ mgbe ngwakọta ngwakọta na ikuku ruru ụfọdụ okpomọkụ. Ihe niile dabere na ọnụọgụ nke ihe na mmekọrịta ya na nrụgide na okpomọkụ nke gburugburu ebe obibi. Ya mere, mgbe semiconductor vacuum pump na-ewepụta mgbasa ozi ndị a, ọ kwesịrị iji gas inert, dị ka nitrogen, mee ka ikuku ndị a dị n'ebe dị nchebe tupu mkpakọ.

3. Lezienụ anya na ntinye nke oxygen:

Ọ bụrụ na ikuku oxygen dị n'ikuku dị elu, ọkụ na ihe ize ndụ ga-eme. Ya mere, n'ọnọdụ ụfọdụ, a ga-akwụ ụgwọ nlebara anya na ntinye nke oxygen, na-eji gas inert na-atụgharị, iji gbochie oke ntinye uche; Na-eche na mmanụ akara mgbapụta n'ibu nwekwara ike mkpa iji ụfọdụ inert na oxygen dakọtara agụụ mgbapụta mmanụ, na n'oge nke nnọchi nke nzacha mmanụ na mmanụ ngwaahịa.

4, gbochie oke okpomọkụ:

Ọ dị mfe ịghọta isi ihe a. N'ime ngwa nke semiconductor na mgbapụta agụụ, enwere ikuku ndị ọzọ na-emerụ ahụ. Ma akọrọ agụụ mgbapụta ka bụ mmanụ akara n'ibu mgbapụta, okpomọkụ dị na mgbapụta ụlọ dị oke elu, na flammable na mgbawa na du gas ga-adị mfe dị ize ndụ na elu okpomọkụ.

Akụkụ 4 ndị dị n'elu bụ isi ihe nchekwa na ntinye nke mgbapụta mgbapụta semiconductor. N'ozuzu, mmanụ akara n'ibu nfuli mkpa ntị ka ihe nchekwa nkọwa karịa akọrọ agụụ nfuli, mkpofu bụ ihe mgbagwoju. Mgbe anyị na-eji mgbapụta mgbapụta, anyị kwesịrị ịṅa ntị na nchekwa nchekwa na onye nduzi, ma rụọ ọrụ dị mma na ntuziaka ọrụ mgbe ị na-eji eme ihe. N'ihi obere nsogbu na arụ ọrụ, mmepụta, arụmọrụ na nchekwa na-ejikọta, anyị kwesịrị ịgbatị ndụ ọrụ nke mgbapụta mgbapụta, gbalịsie ike ịhazi nguzozi, hụ na arụmọrụ na nchekwa.

Mgbanaka mmiri ikuku mgbapụta valvụ flange njikọ ụdị

Dị ka ọdịdị nke nkwonkwo elu, ọ nwere ike kewaa n'ime ụdị ndị a:

1, O-mgbanaka ụdị: nke a bụ ụdị ọhụrụ nke mmiri mgbanaka agụụ agụụ mgbapụta flange njikọ ụdị, na-esochi a dịgasị iche iche nke roba O-mgbanaka mmepe, ọ bụ ihe a pụrụ ịdabere na akara mmetụta karịa izugbe flat washer.

2, trapezoidal groove ụdị: mmiri mgbanaka agụụ mgbapụta valvụ flange njikọ na oval metal mgbanaka dị ka a washer, eji maka arụ ọrụ mgbali 64 kg / cm2 valvụ ma ọ bụ elu okpomọkụ valvụ.

3. Mortise na uzo uzo: The gasket na nnukwu plastic deformation nwere ike ji mee ihe na corrosive ọkara. Mmetụta akara nke mgbanaka mgbanaka ikuku mgbapụta ka mma

4. Ụdị concave na convex: nrụgide na-arụ ọrụ nke mgbapụta mgbapụta mmiri mgbanaka dị elu, a pụkwara iji ihe nkedo siri ike mee ihe.

5, oghere ụdị: onye washer bụ udi nke oghere, mere nke metal. Valvụ nrụgide dị elu ma ọ bụ valvụ okpomọkụ dị elu na nrụgide ọrụ nke 100kg / cm2

6, ụdị dị nro: n'ihi na nrụgide adịghị elu valvụ, nhazi karịa adaba

Mmiri mgbanaka oghere mgbapụta flange njikọ enwere ọtụtụ ụdị, ma ha nwere oge dị iche iche, a na-eji ya eme ihe, anyị kwesịrị ịṅa ntị na ihe kwesịrị ekwesị nke oge ahụ, hụ na mmetụta nke njikọ ahụ dị, emela ka njikọ ahụ ghara ịdaba, na-akpata mmebi nke mmiri. mgbanaka agụụ mgbapụta