Pampu ya vacuum yogwiritsidwa ntchito pachitetezo chachitetezo cha semiconductor imakhudza pampu ya vacuum yamadzivalavukugwirizana kwa flange
Pazaka makumi angapo zapitazi, ndikukula mwachangu kwaukadaulo wa semiconductor, zida za semiconductor zilinso m'mibadwomibadwo yatsopano ndi chitukuko. Masiku ano, kupanga ndi kugwiritsa ntchito zida za semiconductor kumaphatikizapo zinthu zosiyanasiyana zamakina ndi zina zambiri zaukadaulo wapamwamba, wokhala ndi luso lamphamvu. Osati choncho, chitukuko cha zida za semiconductor luso pang'onopang'ono Integrates ndondomeko luso modularization mu zipangizo, kupanga izo kwambiri basi ndi wanzeru kwambiri, pang'onopang'ono kusintha mkhalidwe wa kulekana zachilengedwe zida ndi ndondomeko, ndi nthawi zonse kuyenda patsogolo pa chitukuko. makampani opanga semiconductor system, akugwira ntchito yofunika kwambiri. Ndi kupititsa patsogolo kwa zida za semiconductor, gawo logwiritsira ntchito limakula kwambiri. M'magawo ena opanga zida zamagetsi, zida za semiconductor kapena zida zopangidwa kuchokera ku zida za semiconductor zimatengedwanso mosiyanasiyana, kukhala gawo latsopano logwiritsa ntchito zida za semiconductor. Makamaka pazida zamagetsi zazing'ono / nano, ma micro/nano optoelectromechanical systems ndi zinthu zina zopanga malo ang'onoang'ono kwambiri komanso olondola kwambiri, zimakhala ndi tanthauzo lofunika kwambiri pakupanga zida zamagetsi.
Semiconductor process vacuum imagwiritsidwa ntchito kwambiri mu evaporation, sputtering, PECVD, vacuum adsorption, vacuum adsorption, zida zoyesera, kuyeretsa vacuum ndi njira zina zomangira, kupanga semiconductor ndi kupanga kupanga mosavuta kumatulutsa mpweya woyaka, wophulika komanso wakupha, udzawopseza kupanga ndi chitetezo cha ogwira ntchito, chifukwa chake, kugwiritsa ntchito pampu ya semiconductor vacuum kuyenera kusamala pazinthu zingapo zachitetezo:
1. Sefa ndi kuyeretsa pampu ya vacuum ndi zina, fyuluta ndi chitoliro pa ndandanda kuti mupewe kupanikizika kwambiri:
Pogwiritsira ntchito pampu ya semiconductor vacuum, mapangidwe a sing'anga omwe amachotsedwa mu chipinda chochitiramo ndi pampu ya vacuum angakhale ovuta kwambiri. Mwachitsanzo, SiH4 ndi O2 zimapanga SiO2 pa doko la mpope, ndipo hydrolysis ya TiCl4 idzapanga HCl; Pongoganiza kuti pampu yosindikizira yamafuta amtundu wamafuta, zinthu za gasizi zitha kusinthidwanso ndi mafuta a pampu. Zosinthazi zimapanga mapangidwe a particles, coagulable material, kapena erosive media, zomwe zingatseke pampu ya vacuum kapena mapaipi, zimakhudza ntchito ya pampu ya vacuum, zimayambitsa kukwera kapena kupanikizika kwambiri, ndipo chiopsezo chotchulidwa mu mfundo yachiwiri ndi yaikulu. Chifukwa chake, ndikofunikira kuyeretsa munthawi yake, ndikukhazikitsa zida zosefera pakafunika.
2, dilution yothandiza ya ndende yoyipa ya gasi:
Semiconductor imakonda kutulutsa zomwe tazitchulazi kuti zitha kuyaka komanso zophulika, zapoizoni komanso zowopsa. Choncho, pogwiritsira ntchito pampu ya semiconductor vacuum, pochotsa mauthengawa, ndikofunika kuti atetezedwe kuti asakhale ndi machitidwe osalamulirika pampopi ya vacuum kapena potulutsa mpweya. Monga SiH4, PH3, AsH3, B2H6 ndi zinthu zina, pokhudzana ndi mpweya kapena mpweya, zidzayambitsa kuyaka kapena ngakhale; Mpweya wa haidrojeni umayakanso pamene chiŵerengero chosakaniza mumlengalenga chifika kutentha kwina. Zonse zimadalira kuchuluka kwa chinthucho ndi ubale wake ndi kupanikizika ndi kutentha kwa chilengedwe. Choncho, pamene pampu ya semiconductor vacuum imatulutsa zinthuzi, imayenera kugwiritsira ntchito mpweya wa inert, monga nayitrogeni, kuti isungunuke mipweyayi pamalo otetezeka isanapanikizidwe.
3. Samalani ndi kuchuluka kwa okosijeni:
Ngati mpweya wa mpweya uli wochuluka kwambiri, kuyaka ndi chiopsezo chidzachitika. Choncho, nthawi zina, chidwi chiyenera kuperekedwa kwa ndende ya okosijeni, pogwiritsa ntchito mpweya wa inert kuti uchepetse, kuteteza ndende yochuluka kwambiri; Pongoganiza kuti pampu yosindikizira yamafuta ingafunikirenso kugwiritsa ntchito mafuta opopera otsekemera osakanikirana ndi okosijeni, komanso kusinthanso zosefera zamafuta ndi zinthu zamafuta panthawi yake.
4, kupewa kutentha kwambiri:
N’zosavuta kumvetsa mfundo imeneyi. Pogwiritsira ntchito semiconductor mu vacuum pump, pali mpweya woopsa kwambiri. Kaya pampu ya vacuum yowuma ikadali pampu yosindikizira mafuta, kutentha mu chipinda cha mpope ndikokwera kwambiri, ndipo kuyaka ndi kuphulika ndi gasi wa du kumakhala kowopsa pakatentha kwambiri.
Zomwe zili pamwambapa 4 ndizofunika kwambiri pachitetezo pakugwiritsa ntchito pampu ya semiconductor vacuum. Nthawi zambiri, mapampu amakina osindikizira mafuta amayenera kulabadira zambiri zachitetezo kuposa mapampu a vacuum owuma, kutaya kumakhala kovuta kwambiri. Tikamagwiritsa ntchito mapampu a vacuum, tiyenera kusamala zachitetezo cha kondakitala, ndikuchita ntchito yabwino mu bukhu la opareshoni tikamagwiritsa ntchito mtsogolo. Chifukwa cha zovuta zazing'ono pakugwira ntchito, zotulutsa, zogwira ntchito ndi chitetezo zimagwirizanitsidwa, tiyenera kuwonjezera moyo wautumiki wa pampu ya vacuum, kuyesetsa kugwirizanitsa bwino, kuonetsetsa kuti ntchitoyo ndi yotetezeka.
Madzi a mphete vacuum pampu valavu flange kugwirizana mawonekedwe
Malinga ndi mawonekedwe a pamwamba olowa, akhoza kugawidwa mu mitundu zotsatirazi:
1, O-ring mtundu: uwu ndi mtundu watsopano wa madzi mphete vacuum mpope flange kugwirizana mawonekedwe, akutsatiridwa ndi zosiyanasiyana mphira O-ring chitukuko, ndi odalirika kwambiri kusindikiza zotsatira kuposa wacha wamba wamba.
2, trapezoidal poyambira mtundu: madzi mphete zingalowe mpope valavu flange kugwirizana ndi chowulungika zitsulo mphete monga wochapira ntchito kuthamanga 64 kg/cm2 valavu kapena valavu mkulu kutentha
3. Mtundu wa Mortise ndi groove: Gasket yokhala ndi mapindikidwe akulu apulasitiki atha kugwiritsidwa ntchito pazida zowononga. Kusindikiza kwa pampu ya vacuum yamadzi ndikwabwinoko
4. Mtundu wa concave ndi convex: mphamvu yogwira ntchito ya pampu ya vacuum yamadzi ndiyokwera kwambiri, ndipo chochapira cholimba chingagwiritsidwe ntchito.
5, mtundu wa lens: wochapira ndi mawonekedwe a lens, opangidwa ndi chitsulo. Ma valve othamanga kwambiri kapena ma valve othamanga kwambiri omwe ali ndi mphamvu yogwira ntchito ya 100kg/cm2
6, mtundu wosalala: chifukwa kuthamanga si mkulu valavu, processing yabwino kwambiri
Madzi mphete zingalowe mpope flange kugwirizana pali mitundu yambiri, koma nthawi zosiyanasiyana, ntchito, tiyenera kulabadira kuyenerera kwa mwambowu, kuonetsetsa zotsatira kugwirizana, musati chifukwa kugwirizana kulephera, chifukwa cha kuwonongeka kwa madzi. pompa ya ring vacuum
Nthawi yotumiza: Jan-07-2023
