Vacuum pombi inoshandiswa kune semiconductor process kuchengetedza nyaya dzemvura mhete vacuum pombi vharafu flange yekubatanidza

Vacuum pombi inoshandiswa kune semiconductor process kuchengetedza nyaya dzemvura ring vacuum pombivharafuflange kubatana

Mumakumi emakore apfuura, nekukurumidza kusimudzira kwesemiconductor tekinoroji, semiconductor michina iri zvakare muchizvarwa mushure mechizvarwa hunyanzvi nekusimudzira. Mazuva ano, kugadzira uye kushandiswa kwemidziyo yesemiconductor kunosanganisira akasiyana emakemikari zvinhu uye zvimwe zvakawanda zvehunyanzvi tekinoroji, ine yakasimba tekinoroji yakazara. Kwete zvakadaro chete, kuvandudza semiconductor michina tekinoroji zvishoma nezvishoma inobatanidza iyo process tekinoroji modularization mumidziyo, ichiita kuti ive yakanyanya otomatiki uye yakangwara zvakanyanya, zvishoma nezvishoma ichichinja mamiriro ekuparadzaniswa kwechisikigo kwemidziyo uye maitiro, uye kugara uchifamba pamberi pebudiriro. ye semiconductor system yekugadzira indasitiri, ichitamba yakakosha basa. Nekumwe kusimudzira kwemidziyo yesemiconductor, munda wayo wekushandisa unova wakawanda uye wakafara. Mune dzimwe nzvimbo dzekugadzira zvigadzirwa zvemagetsi, semiconductor midziyo kana michina yakasimudzwa kubva kumidziyo yesemiconductor inogamuchirwawo kune madhigirii akasiyana, ichiva munda mutsva wekushandisa semiconductor michina. Kunyanya mune zvidiki / nano zvigadzirwa zvemagetsi, micro/nano optoelectromechanical masisitimu uye zvimwe zvigadzirwa zvekugadzira munda zvehukuru hwakanyanya uye hwakanyanya kurongeka, ine zvakakosha zvakanyanya kukosha pakuvandudzwa kwezvinhu zvemagetsi.

Semiconductor process vacuum inonyanya kushandiswa mukupupuma, kupuruzira, PECVD, vacuum dry etching, vacuum adsorption, bvunzo michina, vacuum kuchenesa uye mamwe maitiro ekubatanidza, semiconductor kugadzirwa uye kugadzira nzira yekugadzira inopfuta, inoputika uye ine muchetura gasi, ichaisa njodzi kugadzirwa uye kuchengetedza kwevashandi, saka, kushandiswa kwesemiconductor vacuum pombi kunofanirwa kutarisisa kune akati wandei nyaya dzekuchengetedza:

1. Sefa uye chenesa vacuum pombi uye zvimwe zvishongedzo, sefa uye pombi pahurongwa kudzivirira kuwandisa:

Mukushandiswa kwe semiconductor vacuum pombi, kuumbwa kwesvikiro rinobviswa kuburikidza nekamuri rekuita uye vacuum pombi inogona kunge yakaoma zvikuru. Semuenzaniso, SiH4 neO2 inoumba SiO2 pachiteshi chepombi, uye hydrolysis yeTiCl4 ichaumba HCl; Tichifunga kuti chisimbiso chemafuta emhando yemuchina pombi, izvi zvinhu zvegasi zvinogona zvakare kudzoserwa nepombi mafuta. Shanduko idzi dzinofungidzira kuumbwa kwezvikamu, coagulable zvinhu, kana erosive media, iyo inogona kuvhara pombi yevacuum kana piping system, inokanganisa basa repombi yevacuum, inokonzera kukwira kwekumanikidza kana kuwandisa, uye njodzi inotaurwa muchikamu chechipiri yakakura. Naizvozvo, zvinodikanwa kuchenesa nenguva, uye kumisikidza michina yekusefa kana zvichidikanwa.

2, inobudirira dilution yekukuvadza gasi concentration:

Semiconductor inowanzo gadzira izvo zvataurwa pamusoro apa zvinopisa uye zvinoputika, zvine muchetura uye zvinokuvadza magasi. Nokudaro, mukushandiswa kwepombi ye semiconductor vacuum, kana uchibvisa midhiya iyi, zvakakosha kuti udzivise kuti dzisave nemaitiro asingadzoreki mupombi yevacuum kana mukupedza. Zvakadai seSiH4, PH3, ASH3, B2H6 nezvimwe zvinhu, zvakasangana nemhepo kana oksijeni, zvinokonzeresa kupisa kana kunyange; Gasi reHydrogen rinopisawo kana musanganiswa wereshiyo mumhepo wasvika pane imwe tembiricha. Izvo zvese zvinoenderana nehuwandu hwechinhu uye hukama hwayo nekumanikidza uye tembiricha yezvakatipoteredza. Naizvozvo, kana iyo semiconductor vacuum pombi ichibvisa midhiya iyi, inoda kushandisa gasi inert, senge nitrogen, kunyungudutsa magasi aya kunzvimbo yakachengeteka isati yadzvanywa.

3. Teerera kune kuzara kweokisijeni:

Kana okisijeni mumhepo yakanyanyisa, kupisa uye njodzi inoitika. Nokudaro, pane dzimwe nguva, kutarisirwa kunofanira kubhadharwa kuhuwandu hweokisijeni, uchishandisa inert gasi kuti iwedzere, kudzivirira kunyanya kuwanda; Tichifunga kuti mafuta chisimbiso mechanical pombi ingangoda kushandisa imwe inert uye oksijeni inoenderana vacuum pombi mafuta, uye nekutsiva panguva yakakodzera mafirita emafuta uye zvigadzirwa zveoiri.

4, kudzivirira kupisa kwakanyanya:

Zviri nyore kunzwisisa pfungwa iyi. Mukushandiswa kwe semiconductor muvacuum pump, kune mamwe magasi anokuvadza. Kunyangwe yakaoma vacuum pombi ichiri oiri seal mechanical pombi, tembiricha iri mukamuri yepombi yakakwira zvakanyanya, uye inopfuta uye inoputika uye du gasi zvinova nyore kuve nengozi pakupisa kwakanyanya.

Iwo ari pamusoro 4 maficha ndiwo makuru ekuchengetedza nyaya mukushandiswa kwe semiconductor vacuum pombi. Kazhinji, oiri seal mechanical pombi inoda kutarisisa kune akawanda ekuchengetedza ruzivo pane yakaoma vacuum pombi, kuraswa kwakanyanya kuoma. Patinoshandisa pombi dzevacuum, tinofanirwa kutarisisa kune dziviriro dzekuchengetedza mukondakita, uye kuita basa rakanaka mubhuku rekushandisa pakushandisa gare gare. Nekuda kwezvinetso zvidiki pakushanda, kuburitsa, kugona uye kuchengetedzwa kwakabatana, isu tinofanirwa kuwedzera hupenyu hwebasa repombi yevacuum, kuyedza kurongedza chiyero, kuve nechokwadi chekushanda nekuchengetedza.

Mvura mhete vacuum pombi vharafu flange yekubatanidza fomu

Zvinoenderana nechimiro chejoint surface, inogona kukamurwa kuva anotevera marudzi:

1, O-ring type: iyi imhando nyowani yemvura ring vacuum pombi flange yekubatanidza fomu, inoteverwa nemhando dzakasiyana dzeRubber O-ring kusimudzira, inovimbika zvakanyanya mukusunga chisimbiso pane iyo general flat washer.

2, trapezoidal groove mhando: mvura ring vacuum pombi vharafu flange kubatana neoval simbi mhete sewasher, inoshandiswa kushanda kumanikidza 64 kg/cm2 vharafu kana yakakwirira tembiricha vharafu.

3. Mortise uye groove type: Iyo gasket ine hombe yepurasitiki deformation inogona kushandiswa mukuora svikiro. Kuvhara mhedzisiro yemvura ring vacuum pombi iri nani

4. Concave uye convex mhando: kushanda kwekushanda kwemvura ring vacuum pombi yakakwirira, uye washer yakaoma inogona kushandiswa.

5, Lens type: washer chimiro chelens, yakagadzirwa nesimbi. High pressure mavharuvhu kana tembiricha mavharuvhu ane kushanda kumanikidzwa 100kg/cm2

6, yakatsetseka mhando: nekuti kudzvanywa hakusi yakakwira vharafu, kugadzirisa zviri nyore

Mvura ring vacuum pombi flange yekubatanidza kune akawanda mafomu, asi ane zviitiko zvakasiyana, mukushandiswa, isu tinofanirwa kutarisisa kukodzera kwechiitiko, chengetedza mhedzisiro yekubatanidza, haikonzere kukanganisa kwekubatanidza, zvichikonzera kukuvara kwemvura. ring vacuum pombi