Pompo ea vacuum e sebelisoang molemong oa ts'ireletso ea semiconductor litaba tsa ts'ireletso ea ring ea vacuum ea metsibelofokhokahanyo ea flange
Lilemong tse mashome tse fetileng, ka nts'etsopele e potlakileng ea thekenoloji ea semiconductor, lisebelisoa tsa semiconductor li boetse li le molokong o mong ka mor'a tlhahiso le nts'etsopele. Matsatsing ana, tlhahiso le ts'ebeliso ea lisebelisoa tsa semiconductor li kenyelletsa likarolo tse fapaneng tsa lik'hemik'hale le likarolo tse ling tse ngata tsa theknoloji e phahameng, e nang le mahlale a matla a felletseng. Eseng joalo feela, nts'etsopele ea thekenoloji ea lisebelisoa tsa semiconductor butle-butle e kopanya mokhoa oa theknoloji modularization ho thepa, e etsa hore e be e ikemetseng le e bohlale haholo, butle-butle e fetola boemo ba karohano ea tlhaho ea thepa le ts'ebetso, 'me kamehla e tsamaee ka pele ho nts'etsopele. indasteri ea tlhahiso ea li-semiconductor system, e bapala karolo ea bohlokoa e khethehileng. Ka nts'etsopele e tsoelang pele ea lisebelisoa tsa semiconductor, sebaka sa eona sa kopo se ntse se eketseha le ho feta. Likarolong tse ling tsa tlhahiso ea lisebelisoa tsa elektroniki, lisebelisoa tsa semiconductor kapa lisebelisoa tse hlahisitsoeng ho tsoa ho lisebelisoa tsa semiconductor le tsona li amohetsoe ka maemo a fapaneng, ho fetoha sebaka se secha sa ts'ebeliso ea lisebelisoa tsa semiconductor. Haholo-holo ho lisebelisoa tsa elektronike tse nyenyane / nano, micro/nano optoelectromechanical systems le lihlahisoa tse ling tsa tlhahiso ea lihlahisoa tse nyenyane haholo le tse nepahetseng tse phahameng, li na le bohlokoa ba bohlokoa haholo bakeng sa nts'etsopele ea likarolo tsa elektronike.
Semiconductor process vacuum e sebelisoa haholo ho evaporation, sputtering, PECVD, vacuum dry etching, vacuum adsorption, lisebelisoa tsa liteko, tlhoekiso ea vacuum le lits'ebetso tse ling tsa tlamahano, tlhahiso ea semiconductor le ts'ebetso ea tlhahiso e hlahisa habonolo khase e tukang, e phatlohang le e chefo, e tla baka tšokelo ho tlhahiso le polokeho ea basebetsi, ka hona, ts'ebeliso ea pompo ea vacuum ea semiconductor e hloka ho ela hloko litaba tse 'maloa tsa polokeho:
1. Sefa le ho hloekisa pompo ea vacuum le lisebelisoa tse ling, sefa le phala ka kemiso ho qoba khatello e feteletseng:
Tšebelisong ea pompo ea vacuum ea semiconductor, sebopeho sa sehare se ntšitsoeng ka phaposing ea karabelo le pompo ea vacuum se ka ba thata haholo. Ka mohlala, SiH4 le O2 li theha SiO2 boema-kepeng ba pompo, 'me hydrolysis ea TiCl4 e tla theha HCl; Ho nka hore pompo ea mochini ea mofuta oa tiiso ea oli, lintho tsena tsa khase le tsona li ka khutlisoa ka oli ea pompo. Liphetoho tsena li nka ho thehoa ha likaroloana, lintho tse kopanyang, kapa mecha ea phatlalatso e senyang, e ka 'nang ea koala pompo ea vacuum kapa tsamaiso ea liphaephe, e ama ts'ebetso ea pompo ea vacuum, e baka ho phahama ha khatello kapa khatello e feteletseng,' me kotsi e boletsoeng ntlheng ea bobeli e kholoanyane. Ka hona, hoa hlokahala ho hloekisa ka nako, le ho theha lisebelisoa tsa ho sefa ha ho hlokahala.
2, dilution e sebetsang ea khatello ea khase e kotsi:
Semiconductor e na le tšekamelo ea ho hlahisa likhase tse boletsoeng ka holimo tse tukang le tse phatlohang, tse chefo le tse kotsi. Ka hona, ts'ebetsong ea pompo ea semiconductor vacuum, ha u ntša mecha ena ea litaba, hoa hlokahala ho ba thibela ho ba le liketso tse sa laoleheng ho pompo ea vacuum kapa ts'ebetsong ea ho qeta. Tse kang SiH4, PH3, AsH3, B2H6 le lintho tse ling, ha li kopana le moea kapa oksijene, li tla baka mollo kapa esita le; Khase ea haedrojene e boetse ea cha ha karo-karolelano ea motsoako moeeng e fihla mochesong o itseng. Tsohle li itšetlehile ka bongata ba ntho le kamano ea eona le khatello le mocheso oa tikoloho. Ka hona, ha pompo ea semiconductor vacuum e ntša mecha ea litaba, e hloka ho sebelisa khase e sa sebetseng, joalo ka naetrojene, ho hlapolla likhase tsena sebakeng se sireletsehileng pele li hatelloa.
3. Ela hloko boemo ba oksijene:
Haeba oksijene moeeng e phahame haholo, ho tla chesa le kotsi. Ka hona, maemong a mang, tlhokomelo e lokela ho lefshoa ho mahloriso a oksijene, ho sebelisa khase ea inert ho hlapolla, ho thibela khatello e phahameng haholo; Ho nka hore pompo ea mochini e tiisang oli e kanna ea hloka ho sebelisa oli e 'ngoe ea inert le oksijene e tsamaisanang le vacuum, le phetisetso e nakong ea lihloela tsa oli le lihlahisoa tsa oli.
4, thibela mocheso o phahameng haholo:
Ho bonolo ho utloisisa ntlha ena. Tšebelisong ea semiconductor ho pompo ea vacuum, ho na le likhase tse kotsi haholoanyane. Hore na pompo ea vacuum e omeletseng e ntse e le pompo ea mochini o tiisang oli, mocheso ka phaposing ea pompo o phahame haholo, 'me o ka tuka le ho phatloha le khase ea du e tla ba kotsi habonolo mochesong o phahameng.
Lintlha tse ka holimo tse 4 ke litaba tse ka sehloohong tsa polokeho ts'ebetsong ea pompo ea semiconductor vacuum. Ka kakaretso, lipompo tsa mochini oa tiiso ea oli li hloka ho ela hloko lintlha tse ngata tsa polokeho ho feta lipompo tsa vacuum tse omeletseng, ho lahla ho thata ho feta. Ha re sebelisa lipompo tsa vacuum, re lokela ho ela hloko mehato ea tšireletso ho conductor, 'me re etse mosebetsi o motle bukeng ea ts'ebetso ha re sebelisa hamorao. Ka lebaka la mathata a manyenyane mabapi le ts'ebetso, tlhahiso, katleho le ts'ireletso li kopantsoe, re lokela ho lelefatsa bophelo ba tšebeletso ea pompo ea vacuum, ho loanela ho hokahanya ho leka-lekana, ho netefatsa katleho le polokeho.
Foromo ea khokahanyo ea lesale la metsi la vacuum valve flange
Ho ea ka sebopeho sa bokaholimo bo kopaneng, bo ka aroloa ka mefuta e latelang:
1, Mofuta oa O-ring: ona ke mofuta o mocha oa foromo ea khokahano ea ring vacuum vacuum pompo ea flange, e lateloa ke mefuta e fapaneng ea nts'etsopele ea rabara ea O-ring, e ts'epahalla ts'ebetsong ea ho tiisa ho feta washer e akaretsang.
2, mofuta oa trapezoidal groove: lesale la metsi la vacuum vacuum valve flange e nang le selikalikoe sa tšepe ea oval e le mochini o hlatsoang, o sebelisetsoang khatello ea 64 kg / cm2 kapa valve e phahameng ea mocheso.
3. Mofuta oa mortise le groove: Gasket e nang le deformation e kholo ea polasetiki e ka sebelisoa sebakeng se senyang. Matla a ho tiisa pompo ea ring ea vacuum ea metsi e betere
4. Mofuta oa concave le convex: khatello e sebetsang ea pompo ea ring ea vacuum ea metsi e phahame, 'me ho ka sebelisoa washer e thata.
5, mofuta oa lense: washer ke sebopeho sa lense, se entsoeng ka tšepe. Li-valve tsa khatello e phahameng kapa li-valve tsa mocheso o phahameng tse nang le khatello ea ho sebetsa ea 100kg / cm2
6, mofuta o boreleli: bakeng sa khatello ha se belofo e phahameng, ho sebetsa ho bonolo haholoanyane
Metsi lesale vacuum pompo flange kgokelo ho na le mefuta e mengata, empa ba na le linako tse sa tšoaneng, ha e sebelisoa, re lokela ho ela hloko ho tshwaneleha ha ketsahalo eo, etsa bonnete ba hore phello ea kgokelo, u se ke ua etsa hore ho hloleha ho amana, ho fella ka tšenyo ea metsi. pompo ea vacuum ea selikalikoe
Nako ea poso: Jan-07-2023
