Impompo yokufunxa esetyenziswa kwimiba yokhuseleko lwenkqubo ye-semiconductor impompo yeringi yamanziivalveuqhagamshelwano lweflange
Kumashumi eminyaka adlulileyo, ngophuhliso olukhawulezayo lwetekhnoloji ye-semiconductor, izixhobo ze-semiconductor zikwakwisizukulwana emva kokwenziwa kwezinto ezintsha kunye nophuhliso. Kule mihla, ukuveliswa kunye nokusetyenziswa kwezixhobo ze-semiconductor kubandakanya izinto ezahlukeneyo zeekhemikhali kunye neminye imiba emininzi yetekhnoloji ephezulu, enobuchwephesha obuqinileyo. Akunjalo kuphela, uphuhliso lweteknoloji yezixhobo ze-semiconductor ngokuthe ngcembe ludibanisa inkqubo ye-modularization kwisixhobo, iyenza i-automation ephezulu kwaye ikrelekrele kakhulu, itshintsha ngokuthe ngcembe imeko yokwahlulwa kwendalo yezixhobo kunye nenkqubo, kwaye ihlala ihamba phambili kuphuhliso. yoshishino lokwenziwa kwenkqubo ye-semiconductor, edlala indima ebalulekileyo ebalulekileyo. Ngophuhliso olongezelelweyo lwezixhobo ze-semiconductor, intsimi yesicelo sayo iba ngakumbi nangakumbi. Kwamanye amasimi okwenziwa kwezixhobo ze-elektroniki, izixhobo zesemiconductor okanye izixhobo eziye zavela kwisixhobo se-semiconductor nazo zamkelwa ngokwemigangatho eyahlukeneyo, ibe licandelo elitsha lokusetyenziswa kwezixhobo zesemiconductor. Ngokukodwa kwizixhobo zombane ze-micro/nano, i-micro/nano optoelectromechanical systems kunye nezinye iimveliso zokuvelisa ubungakanani obuncinci kunye nokuchaneka okuphezulu, kunokubaluleka okubaluleke kakhulu kuphuhliso lwamacandelo e-elektroniki.
Inkqubo yokucoca i-vacuum ye-Semiconductor isetyenziswa kakhulu kwi-evaporation, i-sputtering, i-PECVD, i-vacuum etching dry, i-vacuum adsorption, izixhobo zokuvavanya, ukucocwa kwe-vacuum kunye nezinye iinkqubo zokubambisana, ukuveliswa kwe-semiconductor kunye nenkqubo yokuvelisa ngokulula ukuvelisa igesi evuthayo, eqhumayo kunye netyhefu, iya kubangela ingozi Imveliso kunye nokhuseleko lwabasebenzi, ke ngoko, ukusetyenziswa kwempompo yokucoca i-semiconductor kufuneka kuthathelwe ingqalelo kwimiba emininzi yokhuseleko:
1. Isihluzo kunye nempompo yokucoca i-vacuum kunye nezinye izixhobo, isihluzo kunye nombhobho kwishedyuli ukunqanda uxinzelelo olugqithisileyo:
Ekusetyenzisweni kwempompo yokucoca i-semiconductor, ukubunjwa kwendawo ekhutshwe ngegumbi lokuphendula kunye nepompo yokucoca inokuba nzima kakhulu. Ngokomzekelo, i-SiH4 kunye ne-O2 ifom ye-SiO2 kwi-pomp port, kunye ne-hydrolysis ye-TiCl4 iya kwenza i-HCl; Ukucinga ukuba uhlobo lwempompo ye-oyile yomatshini, ezi zinto zerhasi zinokuphinda zitshintshwe ngeoyile yempompo. Olu tshintsho luthatha ukubunjwa kweengqungquthela, izinto ezidibeneyo, okanye i-media erosive, enokuthi ivale ipompo ye-vacuum okanye i-piping system, ithintele umsebenzi wempompo ye-vacuum, ibangele ukunyuka kwengcinezelo okanye ukunyanzeliswa, kwaye umngcipheko okhankanywe kwinqanaba lesibini likhulu. Ngoko ke, kuyimfuneko ukucoca ngexesha, kwaye usethe izixhobo zokucoca xa kuyimfuneko.
2, ukuhlanjululwa okusebenzayo koxinzelelo lwerhasi enobungozi:
ISemiconductor ithanda ukuvelisa ezi zinto zikhankanywe ngasentla ezinokutsha neziqhumayo, iigesi eziyityhefu neziyingozi. Ngoko ke, ekusetyenzisweni kwempompo ye-semiconductor vacuum, xa ukhupha le midiya, kuyimfuneko ukuthintela ukuba bangabi neempendulo ezingalawulekiyo kwimpompo yokucoca okanye kwinkqubo yokukhupha. Okufana ne-SiH4, PH3, i-ASH3, i-B2H6 kunye nezinye izinto, ezidibana nomoya okanye i-oxygen, ziya kubangela ukutsha okanye nokuba; Irhasi yehidrojeni nayo iyatsha xa umlinganiselo womxube osemoyeni ufikelela kubushushu obuthile. Konke kuxhomekeke kubungakanani bezinto kunye nobudlelwane bayo noxinzelelo kunye nobushushu bendalo. Ngoko ke, xa i-semiconductor vacuum pump ikhupha le mithombo yeendaba, kufuneka isebenzise igesi ye-inert, efana ne-nitrogen, ukuhlambulula ezi gesi kwindawo ekhuselekileyo ngaphambi koxinzelelo.
3. Nika ingqalelo kuxinzelelo lweoksijini:
Ukuba ioksijini emoyeni iphezulu kakhulu, ukutsha kunye nomngcipheko kuya kwenzeka. Ngoko ke, kwezinye iimeko, ingqalelo kufuneka ihlawulwe ekugxininiseni oksijini, usebenzisa igesi ye-inert ukuze ihlambulule, ukuthintela ukugxininiswa okuphezulu; Ukucinga ukuba impompo yomatshini wokutywina i-oyile inokufuna ukusebenzisa i-oyile yempompo ye-inert kunye ne-oksijini ehambelanayo, kunye nokutshintshwa kwangethuba kwezihluzo zeoyile kunye neemveliso zeoyile.
4, thintela ubushushu obuphezulu kakhulu:
Kulula ukuyiqonda le ngongoma. Ekusetyenzisweni kwe-semiconductor kwimpompo ye-vacuum, kukho iigesi eziyingozi ngakumbi. Nokuba impompo yokucoca eyomileyo iseyimpompo yomatshini wotywino lwe-oyile, ubushushu begumbi lokumpompa buphezulu kakhulu, kwaye inokutsha kunye nokuqhushumba kunye nerhasi ye-du iya kuba lula ukuba yingozi kwiqondo lobushushu eliphezulu.
Le miba ingentla apha yimiba ephambili yokhuseleko ekusetyenzisweni kwempompo yevacuum ye-semiconductor. Ngokuqhelekileyo, iimpompo ze-oyile ze-oyile zifuna ukunikela ingqalelo kwiinkcukacha zokhuseleko ezingaphezulu kuneempompo ze-vacuum ezomileyo, ukulahla kunzima kakhulu. Xa sisebenzisa iimpompo ze-vacuum, kufuneka sinikele ingqalelo kwimiqathango yokhuseleko kwi-conductor, kwaye senze umsebenzi omhle kwincwadana yokusebenza xa usebenzisa kamva. Ngenxa yeengxaki ezincinci ekusebenzeni, ukuphuma, ukusebenza kakuhle kunye nokukhuseleka zidibaniswe, kufuneka sandise ubomi benkonzo yempompo ye-vacuum, sizame ukulungelelanisa ukulinganisela, ukuqinisekisa ukusebenza kakuhle kunye nokhuseleko.
Iringi yamanzi ivacuum yempompo yevalve iflange yoqhagamshelwano ifomu
Ngokobume bomphezulu odibeneyo, unokwahlulwa ngokwezi ntlobo zilandelayo:
I-1, uhlobo lwe-O-ring: olu luhlobo olutsha lwe-vacuum ye-vacuum yepompo yokudibanisa ifom ye-flange, ilandelwa yi-rubber ye-O-ring yophuhliso, inokwethenjelwa ngakumbi kwisiphumo sokutywinwa kune-washer yeflethi ngokubanzi.
2, uhlobo lwe-trapezoidal groove: umsesane wamanzi we-vacuum vacuum uqhagamshelo lwe-valve ye-flange kunye nentsimbi e-oval njenge-washer, esetyenziselwa uxinzelelo lokusebenza 64 kg / cm2 valve okanye ivalve yobushushu obuphezulu.
3. Uhlobo lwe-Mortise kunye ne-groove: I-gasket ene-deformation enkulu yeplastiki inokusetyenziswa kwi-corrosive medium. Ukutywinwa kwempompo ye-vacuum ye-water ring kungcono
4. Uhlobo lweconcave kunye neconvex: uxinzelelo olusebenzayo lwempompo ye-vacuum yamanzi iphezulu, kwaye iwasha elukhuni ingasetyenziswa.
I-5, uhlobo lwe-lens: i-washer yimo ye-lens, eyenziwe ngesinyithi. Iivalve zoxinzelelo oluphezulu okanye iivalve zobushushu obuphezulu kunye noxinzelelo olusebenzayo lwe-100kg / cm2
I-6, uhlobo olugudileyo: kuba uxinzelelo alukho ivalve ephezulu, ukusetyenzwa kukulungele ngakumbi
Amanzi ring vacuum fucum uqhagamshelo flange kukho iindlela ezininzi, kodwa zinezihlandlo ezahlukeneyo, ekusebenziseni, kufuneka sinikele ingqalelo ukufaneleka kweso sihlandlo, ukuqinisekisa isiphumo uqhagamshelo, musa kubangela ukusilela uxhulumaniso, kubangele umonakalo emanzini. impompo yevacuum yeringi
Ixesha lokuposa: Jan-07-2023
