Iphampu yevacuum esetshenziswa kwinqubo yokuphepha kwe-semiconductor ibalulekile kwipompo ye-vacuum yeringi yamanzii-valveuxhumano lwe-flange
Emashumini eminyaka adlule, ngokuthuthuka okusheshayo kobuchwepheshe be-semiconductor, imishini ye-semiconductor nayo isekusungulweni kwesizukulwane emva kwesizukulwane emisha nentuthuko. Namuhla, ukukhiqizwa nokusetshenziswa kwemishini ye-semiconductor kubandakanya izakhi zamakhemikhali ezihlukahlukene nezinye izici eziningi zobuchwepheshe obuphezulu, ezinobuchwepheshe obuqinile obuphelele. Akukona nje kuphela lokho, ukuthuthukiswa kobuchwepheshe bemishini ye-semiconductor kancane kancane kuhlanganisa inqubo ye-modularization yobuchwepheshe emishini, okwenza kube okuzenzakalelayo kakhulu futhi okuhlakaniphe kakhulu, kancane kancane kuguqule isimo sokuhlukaniswa kwemvelo kwemishini kanye nenqubo, futhi njalo ihamba phambili ekuthuthukisweni. yemboni yokukhiqiza i-semiconductor system, edlala indima ebalulekile ebalulekile. Ngokuthuthuka okuqhubekayo kwemishini ye-semiconductor, inkambu yohlelo lokusebenza iya ngokuya iba banzi. Kwezinye izinkambu zokukhiqiza izinsiza zikagesi, okokusebenza kwe-semiconductor noma okokusebenza okuvele kumishini ye-semiconductor nakho kwamukelwa ngamazinga ahlukahlukene, kube insimu entsha yesicelo semishini ye-semiconductor. Ikakhulukazi kuma-micro/nano electronic devices, micro/nano optoelectromechanical systems kanye neminye inkambu yokukhiqiza imikhiqizo yobukhulu obuncane kakhulu nokunemba okuphezulu, inokubaluleka okubaluleke kakhulu ekuthuthukisweni kwezingxenye ze-elekthronikhi.
I-Semiconductor process vacuum isetshenziswa kakhulu ekuhwamukeni, ekufakeni amanzi, ku-PECVD, ku-vacuum adsorption, i-vacuum adsorption, imishini yokuhlola, ukuhlanzwa kwe-vacuum nezinye izinqubo zokubopha, ukukhiqizwa kwe-semiconductor kanye nenqubo yokukhiqiza kukhiqiza kalula igesi yezinto ezivuthayo, eziqhumayo nezinobuthi, zizobeka usongo ukukhiqizwa nokuphepha kwabasebenzi, ngakho-ke, ukusetshenziswa kwephampu ye-semiconductor vacuum kudingeka kunake izindaba eziningana zokuphepha:
1. Hlunga futhi uhlanze iphampu yevacuum nezinye izesekeli, isihlungi kanye nepayipi kusesikhathini ukuze ugweme ukucindezela ngokweqile:
Ekusetshenzisweni kwepompo ye-vacuum ye-semiconductor, ukwakheka kwento ephakathi ekhishwa ngegumbi lokusabela kanye nepompo ye-vacuum kungase kube yinkimbinkimbi kakhulu. Isibonelo, i-SiH4 ne-O2 zakha i-SiO2 embotsheni yepompo, futhi i-hydrolysis ye-TiCl4 izokwakha i-HCl; Ngokucabanga ukuthi uhlobo lwephampu ye-oil seal mechanical, lezi zinto zegesi zingahle zihlehliswe ngowoyela wepompo. Lezi zinguquko zithatha ukwakheka kwezinhlayiya, izinto ezibophayo, noma imidiya egugulekayo, engase ivale iphampu ye-vacuum noma isistimu yepayipi, ithinte umsebenzi wepompo ye-vacuum, ibangele ukunyuka kwengcindezi noma ukucindezela ngokweqile, futhi ingozi eshiwo ephuzwini lesibili inkulu. Ngakho-ke, kuyadingeka ukuhlanza ngesikhathi, futhi usethe imishini yokuhlunga uma kunesidingo.
2, ukuhlanjululwa okusebenzayo kokuhlushwa kwegesi eyingozi:
I-Semiconductor ijwayele ukukhiqiza lokhu okubalulwe ngenhla okungavuthela nokuqhuma, amagesi anobuthi nayingozi. Ngakho-ke, ekusetshenzisweni kwepompo ye-vacuum ye-semiconductor, lapho ukhipha le midiya, kuyadingeka ukuyivimbela ekubeni nokusabela okungalawuleki kupompo ye-vacuum noma inqubo yokukhipha umoya. Okufana ne-SiH4, PH3, ASH3, B2H6 nezinye izinto, ezithinta umoya noma umoya-mpilo, zizobangela ukusha noma ngisho; Igesi ye-hydrogen nayo iyasha lapho isilinganiso sengxube emoyeni sifinyelela izinga elithile lokushisa. Konke kuncike kumthamo wento kanye nobudlelwano bayo nokucindezela kanye nezinga lokushisa kwemvelo. Ngakho-ke, lapho iphampu ye-semiconductor vacuum ikhipha le midiya, idinga ukusebenzisa igesi engasebenzi, njenge-nitrogen, ukuze ihlambulule la magesi ebangeni eliphephile ngaphambi kokucindezelwa.
3. Naka ukugcwala komoyampilo:
Uma i-oxygen emoyeni iphezulu kakhulu, ukuvutha nobungozi kuzokwenzeka. Ngakho-ke, kwezinye izimo, ukunakwa kufanele kukhokhwe ekugxilweni kwe-oxygen, usebenzisa igesi ye-inert ukuze ihlanjululwe, ukuvimbela ukugxila okuphezulu kakhulu; Uma sicabanga ukuthi iphampu yemishini yophawu lwamafutha ingase idinge ukusebenzisa uwoyela wepompo we-vacuum we-inert ne-oksijini ohambisanayo, kanye nokushintshwa okufika ngesikhathi kwezihlungi zikawoyela nemikhiqizo kawoyela.
4, vimbela izinga lokushisa eliphezulu kakhulu:
Kulula ukuqonda leli phuzu. Ekusetshenzisweni kwe-semiconductor kupompo ye-vacuum, kunamagesi ayingozi kakhulu. Ukuthi ipompo ye-vacuum eyomile iseyipompo yomshini we-oil seal, izinga lokushisa ekamelweni lepompo liphezulu kakhulu, futhi elivuthayo neliqhumayo kanye ne-du gas kuzoba yingozi kalula ekushiseni okuphezulu.
Izici ezi-4 ezingenhla ziyizindaba eziyinhloko zokuphepha ekusetshenzisweni kwephampu ye-semiconductor vacuum. Ngokuvamile, amaphampu emishini ye-oil seal adinga ukunaka imininingwane yokuphepha eyengeziwe kunamaphampu e-vacuum omile, ukulahlwa kuyinkimbinkimbi kakhulu. Uma sisebenzisa amaphampu evacuum, sidinga ukunaka izinyathelo zokuphepha ku-conductor, futhi senze umsebenzi omuhle kumanuwali wokusebenza lapho sisebenzisa kamuva. Ngenxa yezinkinga ezincane ekusebenzeni, okukhiphayo, ukusebenza kahle nokuphepha kuxhunywe, kufanele sandise impilo yesevisi yepompo ye-vacuum, silwele ukuxhumanisa ibhalansi, siqinisekise ukusebenza kahle nokuphepha.
Ifomu lokuxhumana le-vacuum ye-vacuum ye-vacuum ye-valve flange yamanzi
Ngokusho kokuma kwendawo ehlangene, ingahlukaniswa ngezinhlobo ezilandelayo:
I-1, uhlobo lwendandatho ye-O: lolu uhlobo olusha lwefomu lokuxhuma le-vacuum ye-vacuum yepompo le-flange lamanzi, lilandelwa ukuthuthukiswa okuhlukahlukene kwe-O-ring yerabha, kunokwethenjelwa kakhulu ekusebenzeni kokuvala kune-washer evamile.
2, uhlobo lwe-trapezoidal groove: indandatho yamanzi ye-vacuum futha i-valve flange uxhumano ne-oval metal ring njengewasha, esetshenziselwa ingcindezi yokusebenza engu-64 kg/cm2 valve noma i-valve yokushisa ephezulu
3. Uhlobo lwe-Mortise ne-groove: I-gasket ene-deformation enkulu yepulasitiki ingasetshenziswa endaweni ebolayo. Umphumela wokuvala wephampu yevacuum yendandatho yamanzi ungcono
4. Uhlobo lwe-Concave kanye ne-convex: ingcindezi yokusebenza yephampu ye-vacuum yendandatho yamanzi iphakeme, futhi iwasha eqinile ingasetshenziswa
I-5, uhlobo lwe-lens: i-washer yisimo se-lens, eyenziwe ngensimbi. Ama-valve okucindezela okuphezulu noma ama-valve okushisa aphezulu anokucindezela kokusebenza okungu-100kg/cm2
I-6, uhlobo olubushelelezi: ingcindezi ayiyona i-valve ephezulu, icubungula kalula
Amanzi indandatho vacuum futha flange uxhumano kukhona izinhlobo eziningi, kodwa banezikhathi ezahlukene, ukusetshenziswa, kufanele sinake ukufaneleka senzakalo, ukuqinisekisa umphumela uxhumano, musa kubangela ukwehluleka uxhumano, okuholela ekulimaleni kwamanzi. indandatho vacuum futha
Isikhathi sokuthumela: Jan-07-2023
