Pompe ya Vacuum ikoreshwa kuri semiconductor inzira yumutekano ibibazo byamazi impeta ya vacuumindangaguhuza flange
Mu myaka mirongo iheze, hamwe niterambere ryihuse ryikoranabuhanga rya semiconductor, ibikoresho bya semiconductor nabyo biri mubisekuru nyuma yibisekuru bishya niterambere. Muri iki gihe, gukora no gukoresha ibikoresho bya semiconductor birimo ibintu bitandukanye bya shimi nibindi bintu byinshi byubuhanga buhanitse, hamwe nubuhanga bukomeye. Ntabwo aribyo gusa, iterambere ryikoranabuhanga ryibikoresho bya semiconductor gahoro gahoro gahuza uburyo bwikoranabuhanga rya modulisiyonike mu bikoresho, bigatuma ikora cyane kandi ifite ubwenge bwinshi, igenda ihindura buhoro buhoro imiterere yo gutandukanya bisanzwe ibikoresho nibikorwa, kandi ihora igenda imbere yiterambere. ya semiconductor sisitemu yinganda zikora, zifite uruhare runini. Hamwe niterambere ryiterambere ryibikoresho bya semiconductor, umurima wabyo ugenda uba mwinshi. Mubindi bikoresho bikoresha ibikoresho bya elegitoronike, ibikoresho bya semiconductor cyangwa ibikoresho byavuye mubikoresho bya semiconductor nabyo bikoreshwa muburyo butandukanye, bihinduka umurima mushya wibikoresho bya semiconductor. Cyane cyane mubikoresho bya elegitoroniki ya micro / nano, sisitemu ya micro / nano optoelectromechanical nibindi bicuruzwa bikora murwego ruto cyane kandi rwuzuye, bifite akamaro kanini mugutezimbere ibikoresho bya elegitoroniki.
Icyuma cya Semiconductor gikoreshwa cyane cyane mu guhumeka, gusohora, PECVD, vacuum yumye, vacuum adsorption, ibikoresho byo gupima, gusukura vacuum hamwe nubundi buryo bwo guhuza, umusaruro wa semiconductor hamwe ninganda zikora byoroshye kubyara gaze yaka umuriro, iturika kandi ifite ubumara, bizatera ubwoba umusaruro n’umutekano w’abakozi rero, ikoreshwa rya pompe ya semiconductor vacuum igomba kwitondera ibibazo byinshi byumutekano:
1. Shungura kandi usukure pompe ya vacuum nibindi bikoresho, kuyungurura na pipe kuri gahunda kugirango wirinde gukabya:
Mugukoresha pompe ya semiconductor vacuum, ibigize uburyo bwakuwe mucyumba cya reaction na pompe vacuum birashobora kuba bigoye cyane. Kurugero, SiH4 na O2 bigize SiO2 ku cyambu cya pompe, na hydrolysis ya TiCl4 izakora HCl; Dufashe ko amavuta ya kashe ya pompe yamashanyarazi, ibyo bintu bya gaze birashobora kandi guhindurwa namavuta ya pompe. Izi mpinduka zifata ko habaho ibice, ibintu bishobora guhuzagurika, cyangwa itangazamakuru ryangiza, rishobora guhagarika pompe ya vacuum cyangwa imiyoboro ya pompe, bigira ingaruka kumikorere ya pompe vacuum, bigatera umuvuduko ukabije cyangwa umuvuduko ukabije, kandi ingaruka zavuzwe mumutwe wa kabiri ni nyinshi. Kubwibyo, birakenewe koza mugihe, no gushyiraho ibikoresho byo kuyungurura mugihe bibaye ngombwa.
2, kugabanya neza ingufu za gaze yangiza:
Semiconductor ikunda kubyara imyuka yaka umuriro kandi iturika, uburozi kandi bwangiza. Kubwibyo, mugukoresha pompe ya semiconductor vacuum, mugihe ikuramo ibyo bitangazamakuru, birakenewe ko tubabuza kugira reaction zimwe na zimwe zidashobora kugenzurwa muri pompe ya vacuum cyangwa mugikorwa cyo gusohora. Nka SiH4, PH3, AsH3, B2H6 nibindi bintu, bihuye numwuka cyangwa ogisijeni, bizatera umuriro cyangwa ndetse; Gazi ya hydrogène nayo irashya iyo igipimo kivanze nikirere kigeze ku bushyuhe runaka. Byose biterwa nubunini bwibintu nubusabane bwabyo nigitutu nubushyuhe bwibidukikije. Kubwibyo, iyo pompe ya semiconductor vacuum ikuramo ibyo bitangazamakuru, igomba gukoresha gaze ya inert, nka azote, kugirango igabanye iyo myuka ahantu hizewe mbere yo kwikuramo.
3. Witondere kwibanda kuri ogisijeni:
Niba ogisijeni yo mu kirere ari ndende cyane, gutwikwa hamwe n'ingaruka bizabaho. Kubwibyo, mubihe bimwe na bimwe, hakwiye kwitabwaho kwibanda kuri ogisijeni, ukoresheje gaze ya inert kugirango uyunguruze, kugirango wirinde cyane; Dufashe ko amavuta ya pompe yamashanyarazi ashobora kandi gukenera gukoresha amavuta ya vacuum ya inert na ogisijeni, hamwe no gusimbuza mugihe cyungurura amavuta nibicuruzwa bya peteroli.
4, irinde ubushyuhe buri hejuru:
Biroroshye kumva iyi ngingo. Mugukoresha semiconductor muri pompe vacuum, hariho imyuka myinshi yangiza. Niba pompe ya vacuum yumye iracyari pompe yubukanishi bwa peteroli, ubushyuhe mucyumba cya pompe ni bwinshi cyane, kandi umuriro ugurumana kandi uturika na gaze bizoroha byoroshye mubushyuhe bwinshi.
Ibice 4 byavuzwe haruguru nibibazo byingenzi byumutekano mugukoresha pompe ya semiconductor. Muri rusange, amapompe ya kashe ya peteroli agomba kwitondera amakuru arambuye yumutekano kuruta pompe yumye, kujugunya biragoye. Iyo dukoresheje pompe vacuum, dukeneye kwitondera ingamba z'umutekano mukuyobora, kandi tugakora akazi keza mumfashanyigisho mugihe dukoresha nyuma. Kubera ibibazo bito ku mikorere, ibisohoka, gukora neza n'umutekano birahujwe, dukwiye kongera igihe cya serivisi ya pompe vacuum, duharanira guhuza uburinganire, kwemeza imikorere n'umutekano.
Ifishi y'amazi vacuum pump valve flange ihuza
Ukurikije imiterere yubuso buhuriweho, irashobora kugabanywa muburyo bukurikira:
1, Ubwoko bwa O-impeta: ubu ni ubwoko bushya bwamazi yimpeta ya vacuum pump flange ihuza, ikurikirwa niterambere rya reberi O-impeta itandukanye, byizewe muburyo bwo gufunga kuruta gukaraba rusange.
2, ubwoko bwa trapezoidal groove: impeta yamazi vacuum pump valve flange ihuza impeta yicyuma cya oval nkuwamesa, ikoreshwa kumuvuduko wakazi 64 kg / cm2 valve cyangwa ubushyuhe bwo hejuru
3. Ubwoko bwa Mortise na groove: Igipapuro gifite imiterere nini ya plastike irashobora gukoreshwa muburyo bubora. Ingaruka yo gufunga amazi ya vacuum pomp nibyiza
4. Ubwoko bwa concave na convex: umuvuduko wakazi wa pompe ya vacuum wamazi ni mwinshi, kandi wogeje urashobora gukoreshwa
5, ubwoko bwa lens: isabune nuburyo bwa lens, bukozwe mubyuma. Umuvuduko ukabije cyangwa ubushyuhe bwo hejuru hamwe numuvuduko wakazi wa 100kg / cm2
6, ubwoko bworoshye: kubitutu ntabwo ari valve ndende, gutunganya byoroshye
Amazi ya vacuum pump flange ihuza hari uburyo bwinshi, ariko bifite ibihe bitandukanye, mugukoresha, dukwiye kwitondera uburyo bukwiye bwibirori, tukareba ingaruka zumuhuza, ntutere kunanirwa guhuza, bikaviramo kwangiza amazi impeta ya vacuum
Igihe cyo kohereza: Mutarama-07-2023
